Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Saburo Nonogaki (Author), Ueno Takumi (Author), Toshio Ito (Author)"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
Categorie:
Anno:
1998
Edizione:
1
Casa editrice:
CRC Press
Lingua:
english
ISBN 10:
1351822020
ISBN 13:
9781482273762
File:
PDF, 28.09 MB
IPFS:
,
english, 1998
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